SVG 88XX track


Photoresist tracks

Gas sonics etcher




SVG 88XX spare parts


SVG Legacy systems



Control modules

LTN Semiconductor offers support equipment for SVG 86 and SVG 88 photoresist tracks such as the Chemical Cabinet.


-     PLC Control
-    Auto switching canister EBR, Developer fluid, HMDS.
-    Auto switching Photo resist bottle
-    Leak detector.