Controllers and PC boards

Rinse cup kits

Spindle up/down assembly

HPO cover upgrade

SVG photoresist track spare parts for SVG 81, SVG 86 and SVG 88. LTN Semiconductor manufactures and stocks spare parts and upgrade

components for SVG 86 and SVG 88 photoresist systems. If you do not see the part you need, just give us a call.


Spare parts listing for SVG 86 and SVG 88 as PDF documents. Adobe reader required to open.



                 SVG 86                            SVG 88