

Controllers and PC boards


Rinse cup kits


Spindle up/down assembly
HPO cover upgrade
SVG photoresist track spare parts for
SVG 81, SVG 86
and SVG 88. LTN Semiconductor manufactures and stocks spare
parts and upgrade
components for SVG 86 and SVG 88 photoresist systems. If you do not see the part you need, just give us a call.
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Centering tabs, valve, cylinder
Chucks, motors, and more..
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Valve blocks
Spindle parts
Spare parts listing for SVG 86 and SVG 88 as PDF documents. Adobe reader required to open.
SVG 86 SVG 88