LTN Semiconductor developed the SVG 88 HPO exhaust assembly for control of vapors during photoresist bake.

NOTE: Only available with Nettrack software option.

SVG 86 - SVG 88 Precision lift assembly

LTN Semiconductor developed the new lift assembly which positions the wafer exactly with ramp up and ramp down speed to eliminate wafer breakage. Unlike the OEM air cylinder which is plagued with sticking and friction, LTN Semiconductor utilizes proven stepper motor and drive components used in the semiconductor world.