112-005 motor drive

Precision high speed motor kit.

 

Improved dispense cups

Replacement keypad overlay

Precision lift assembly

SVG 81, SVG 86 and SVG 88 Upgrade components.

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    SVG 88 HPO with environment cover upgrade

     

    LTN Semiconductor developed the SVG 88 HPO exhaust assembly for control of vapors during photoresist bake.

    NOTE: Only available with Nettrack software option.

    SVG 86 - SVG 88 Precision lift assembly

    LTN Semiconductor developed the new lift assembly which positions the wafer exactly with ramp up and ramp down speed to eliminate wafer breakage. Unlike the OEM air cylinder which is plagued with sticking and friction, LTN Semiconductor utilizes proven stepper motor and drive components used in the semiconductor world.

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